Fabrication of self-aligned gallium arsenide mosfets using damascene gate methods

ABSTRACT

A method for fabricating a gallium arsenide MOSFET device is presented. A dummy gate is formed over a gallium arsenide substrate. Source-drain extensions are implanted into the substrate adjacent the dummy gate. Dummy spacers are formed along dummy gate sidewalls and over a portion of the source-drain extensions. Source-drain regions are implanted. Insulating spacers are formed on dummy oxide spacer sidewalls. A conductive layer is formed over the source-drain regions. The conductive layer is annealed to form contacts to the source-drain regions. The dummy gate and the dummy oxide spacers are removed to form a gate opening. A passivation layer is in-situ deposited in the gate opening. The surface of the passivation layer is oxidized to create an oxide layer. A dielectric layer is ex-situ deposited over the oxide layer. A gate metal is deposited over the dielectric layer to form a gate stack in the gate opening.

BACKGROUND OF THE INVENTION

The present invention relates to fabricating self-aligned metal oxidesemiconductor field effect transistors (MOSFETS), and more particularly,to fabricating self-aligned, inversion mode gallium arsenide MOSFETSwith excellent electrical characteristics.

The difficulty of increasing performance in sub-100 nm silicon (Si)complementary metal-oxide semiconductor (CMOS) technology has renewedinterest in the use of Group III-V channel materials for advanced verylarge-scale integration (VLSI) CMOS. Gallium Arsenide (GaAs) is anattractive choice due to its relative maturity compared to other GroupIII-V compounds, its high electron mobility (˜6× compared to Si), andits lattice matching with germanium (Ge). The main barrier towardsimplementing enhancement—or depletion—mode GaAs MOSFETs for VLSIapplication is the difficulty of forming a high-quality gate insulatorthat passivates the interface states and prevents Fermi level pinning atthe GaAs surface. However, other problems also need to be overcomeincluding poor thermal stability of the gate stack and the lack of aself-aligned contacting scheme.

Recently, GaAs n-channel metal-oxide semiconductor (NMOS) capacitorswith an in-situ molecular beam epitaxy (MBE) grown amorphous silicon(α-Si) passivation layer and ex-situ physical vapor deposition (PVD)hafnium oxide (HfO₂) gate dielectric have shown excellent electricalcharacteristics. Interface state densities D_(it) as low as1×10¹¹/cm².eV are obtained with excellent thermal stability of theGaAs/α-Si/SiO₂/HfO₂ . When self-aligned GaAs MOSFETs were fabricatedusing conventional metal-oxide semiconductor (MOS) processes, thedevices exhibited poor electrical characteristics, namely largesubthreshold slope and small on-off current ratio of 10³, a value thatwas limited by gate leakage current. The poor electrical characteristicsand high gate leakage were attributed to GaAs/α-Si/SiO₂/HfO₂ interfacedegradation caused by conventional high-temperature front end of theline MOS processes.

Therefore, there is a need for a method of fabricating a self-aligning,inversion mode GaAs MOSFET with excellent electrical characteristics.

BRIEF SUMMARY OF THE INVENTION

According to embodiments of the present invention, a process tofabricate self-aligned, inversion mode GaAs MOSFETS with excellentelectric characteristics is presented. The process uses damascene gatemethods enabling the deposition of the MOSFET gate stack after all thefront-end-of-the-line (FEOL) hot processes are performed. In thedamascene gate method, the α-Si/SiO₂/HfO₂/metal gate stack is depositedin a groove formed by removing a dummy gate. As technologies scale tosmaller dimensions, the gate length of the GaAs MOSFET gets shorter,hence the α-Si/SiO₂/HfO₂ stack occupies an increasing fraction of thegroove. In addition, the gate itself tends to be rounded at the bottommeaning that only the center of the gate has full control of thechannel, and the presence of a gap between the source and drain (S/D)extension and the gate edge increases the on resistance of the MOSFETand degrades its performance. By using a dummy spacer formed along thesidewall of the dummy gate, the groove can be made much wider, for agiven gate length, while also allowing the accurate placement of the S/Dextension edges inside the groove to eliminate the gap between the S/Dextension and the actual gate. The wider groove facilitates theintroduction of the α-Si/SiO₂/HfO₂/metal gate stack. Self-aligned sourceand drain regions are formed using Si⁺ ion implantation. The contactsare formed by patterning a conductive metal alloy such as GeAuNiAu.

Accordingly, it is a feature of the embodiments of the present inventionto provide a self-aligned source/drain contacting scheme.

Because the degradation of the GaAs/α-Si/SiO₂/HfO₂ interface in the GaAsMOSFETs is caused by conventional MOS high temperature FEOL processing,it is another feature of the embodiments of the present invention toprovide an integration scheme for GaAs MOSFETs using damascene gatemethods where all high-temperature FEOL processes are carried out priorto gate stack deposition to improve GaAs MOSFET device characteristics.Other features of the embodiments of the present invention will beapparent in light of the description of the invention embodied herein.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The following detailed description of embodiments of the presentinvention can be best understood when read in conjunction with thefollowing drawings, where like structure is indicated with likereference numerals and in which:

FIGS. 1 a-m schematically illustrate the basic processing steps of theformation of a self-aligned Gallium Arsenide metal oxide semiconductorfield effect transistor according to an embodiment of the presentinvention.

DETAILED DESCRIPTION

In the following detailed description of the embodiments, reference ismade to the accompanying drawings that form a part hereof, and in whichare shown by way of illustration, and not by way of limitation, specificembodiments in which the invention may be practiced. It is to beunderstood that other embodiments may be utilized and that logical,mechanical and electrical changes may be made without departing from thespirit and scope of the present invention.

FIGS. 1 a-1 m illustrate the formation of a self-aligned GaAs MOSFETdevice 10 with high-k gate dielectrics using damascene gate methods in astepwise fashion. Referring to FIG. 1 a, a substrate 100 of bulk undoped<100> orientated GaAs wafer is generally provided. A sacrificial oxidelayer 110, comprising, for example, SiO₂ or any other suitablesacrificial material, can be deposited over the substrate 100 usingconventional deposition methods such as, for example, low pressurechemical vapor deposition (LPCVD). The thickness of the sacrificialoxide layer 110 may vary but typically has a thickness of about 10 nm.

Shallow Trench Isolation (STI) regions 120 are formed in the substrate100. The STI openings are formed by first applying a conventional resistto the exposed surface of sacrificial oxide layer 110 (not shown).Lithography creates a pattern on the resist. The resist pattern is thentransferred by conventional etching processing through the sacrificialoxide layer 110 and a portion of substrate 100 so as to provide thestructure shown in FIG. 1 a. After the trenches are formed in thesacrificial oxide layer 110 and the substrate 100, the trenches arefilled with dielectric material such as, for example, high-densityplasma oxide or TEOS (tetraethylorthosilicate). In one embodiment, theSTI regions 120 are formed using liquid phase chemical enhancedoxidation. In another embodiment, the STI regions 120 are formed usingoxygen implantation followed by activation annealing at 450° C. in ahelium gas ambient. Although only two STI regions 120 are illustrated,any number of STI regions 120 may be formed in the substrate 100.

Turning to FIG. 1 b, deep P-well 200 implantation can be made into thesubstrate 100 followed by shallow n-channel 210 implantation forenhancement-mode devices 10 (See FIG. 1 m) and depletion-mode devices 10utilizing conventional methods well known in the art. The implantationsare then annealed at 900° C. for 5 seconds in nitrogen gas. As shown in,FIG. 1 c, a dummy gate 300 is formed over the sacrificial oxide layer110. The dummy gate 300 is comprised of sacrificial polysilicon or anyother suitable related material. The dummy gate 300 may be formed usingconventional deposition processes such as, for example, CVD,plasma-assisted CVD and sputtering, or LPCVD. Dummy gate 300 ispatterned by lithography and etching. Although, the formation of onlyone dummy gate 300 is illustrated, it should be noted that any number ofdummy gates 300 can be formed on the surface of the substrate 100 tocreate a plurality of MOSFET devices 10.

Silicon source/drain extensions 310 are then implanted in the substrate100. The source/drain extensions 310 may be formed utilizingconventional ion implantation and annealing techniques that are wellknown in the art. As shown in FIG. 1 d, dummy oxide spacers 400 areformed along the sidewalls of the dummy gate 300 and over portion of thesource/drain extensions 310. The dummy oxide spacers 400 are formedutilizing conventional deposition processes that are well known in theart.

As shown in FIG. 1 e, the silicon source and drain 500 are implantedusing silicon ion (Si+) implantation and are annealed at 1000° C. for 5seconds in nitrogen gas. In FIG. 1 f, insulating spacers 600 are formedon the sidewalls of the dummy oxide spacers 400. The insulating spacers600 may comprise nitride, oxynitride or a combination thereof. Thesource and drain regions 500 are defined by a photoresist layer 610. Alayer 620 is formed by evaporating gold germanium (AuGe) to a thicknessof approximately 50 nm, followed by evaporating nickel to a thickness ofapproximately 25 nm, which in turn is followed by evaporating gold overthe device 10 to a thickness of approximately 200 nm. The photoresistlayer 610 and the metals in layer 620 are lifted off by conventionalmethods known in the art to yield source/drain contact pads 620 as shownin FIG. 1 g. The device 10 is annealed in nitrogen at 400° C. for sixtyseconds to form the source/drain ohmic AuGeNiAu alloy contacts 620.

As shown in FIG. 1 h, a nitride overlayer 700 is deposited over thedevice 10. An oxide layer 710 is then deposited on the nitride layer700, and the oxide layer 710 is planarized so that the uppermost surfaceof the oxide layer 710 is substantially co-planar to the uppermostsurface of the nitride layer 700. Any conventional planarization processsuch as chemical-mechanical polishing or grinding may be utilized. Theoxide layer 710 can be, for example, high-density plasma oxide, TEOS, orany other suitable oxide.

As shown in FIG. 1 i, the oxide layer 710 and nitride layer 700 areremoved by reactive ion etching (RIE) so that the uppermost surface ofthe nitride layer 700 is substantially co-planar to the uppermostsurface of the dummy gate 300.

As shown in FIG. 1 j, the dummy gate 300 is removed by etching utilizingRIE or a chemical down stream etching process exposing the sacrificialoxide layer 110 and resulting in the formation of gate opening 720. Asshown in FIG. 1 k, the dummy oxide spacer 400 and the sacrificial oxidelayer 110 in the gate opening 720 are removed by etching utilizingconventional etching processing stopping on the uppermost surface of thedeep P-doped well 200 of substrate 100. The innermost surface of theinsulating spacers 600 define the boundaries of the gate opening 720.The source-drain extensions 310 edges are within the gate opening 720resulting in no gap between the source-drain extensions 310 and the gateopening 720. The removal of the dummy oxide spacers 400 has allowed theresulting gate opening 720 to be made much wider for a given gatelength. Additionally, the wider gate opening 720 facilitates gateformation.

As shown in FIG. 1 l, after all the front-end-of-the-line hot processesare preformed, the uppermost surface of the n-doped GaAs channel 210within the gate opening 720 is wet cleaned. The device 10 is then loadedinto an MBE (Molecular Beam Epitaxy) system and any remaining surfaceoxygen is removed using atomic hydrogen. The first component of the gatestack is an approximately 1.5 nm layer of amorphous silicon (α-Si) 800which is in-situ deposited over the device 10 and into the gate opening720 as a passivation layer. The device 10 is then oxidized in air (i.e.,native oxide) to create a layer of silicon dioxide. The layer of silicondioxide can have a thickness of between about 0.3 nm to about 10 nm.Preferably, the layer of silicon dioxide should be less than 1 nm. Anapproximately 10 nm thick high dielectric constant (k) dielectric layer810 of Hafnium oxide (HfO₂) is ex-situ deposited on the device 10 andinto the gate opening 720 over the α-Si 800 layer by atomic layerdeposition (ALD) at 300° C. The device 10 is then annealed at 600° C. innitrogen gas containing 5% oxygen. Finally, as shown in FIG. 1 m, aconductive material 900 such as polysilicon, W, Ta, or TiN is thenformed in the gate opening 720 over the dielectric layer 810 utilizingconventional deposition processes including, but not limited to: CVD,plasma-assisted CVD, sputtering, plating, evaporation and other likedeposition processes. The structure may then be planarized byconventional planarization processes, e.g., CMP, to the uppermostsurfaces of the nitride layer 700 and the insulating spacers 600.

It is noted that terms like “preferably,” “commonly,” and “typically”are not utilized herein to limit the scope of the claimed invention orto imply that certain features are critical, essential, or evenimportant to the structure or function of the claimed invention. Rather,these terms are merely intended to highlight alternative or additionalfeatures that may or may not be utilized in a particular embodiment ofthe present invention.

Having described the invention in detail and by reference to specificembodiments thereof, it will be apparent that modifications andvariations are possible without departing from the scope of theinvention defined in the appended claims. More specifically, althoughsome aspects of the present invention are identified herein as preferredor particularly advantageous, it is contemplated that the presentinvention is not necessarily limited to these preferred aspects of theinvention.

1. A method for fabricating a gallium arsenide MOSFET device, the methodcomprising: forming a dummy gate over a gallium arsenide substrate;implanting source-drain extensions into the substrate adjacent the dummygate; forming dummy oxide spacers along the sidewalls of the dummy gateand over a portion of the source-drain extensions; implanting andannealing source-drain regions adjacent the source-drain extensions;forming insulating spacers on the sides of the dummy oxide spacers;defining the source-drain regions with a photoresist layer; forming aconductive layer over the photoresist layer; lifting off the photoresistlayer and annealing the conductive layer to form contacts to thesource-drain regions; removing the dummy gate and the dummy oxidespacers to form a gate opening; depositing in-situ a passivation layerin the gate opening; oxidizing the surface of the passivation layer tocreate an oxide layer; depositing ex-situ a dielectric layer over theoxide layer; and depositing a gate metal over the dielectric layer toform a gate stack in the gate opening.
 2. The method of claim 1, furthercomprising: depositing a sacrificial oxide layer on the substrate;forming shallow trench isolations regions in the substrate; implantingdeep p-wells into the substrate; and implanting and annealing shallown-channels after the deep p-well implants before the formation of thedummy gate over the substrate.
 3. The method of claim 1, wherein thesource-drain regions are annealed at about 1000° C. for 5 seconds innitrogen gas.
 4. The method of claim 1, wherein the conductive layer isformed by evaporating a layer of gold geranium over the photoresistlayer and the source-drain regions, evaporating a layer of nickel overthe layer of gold geranium and evaporating a layer of gold over thelayer of nickel,.
 5. The method of claim 4, wherein the layer of goldgeranium is about 50 nm thick.
 6. The method of claim 4, wherein thelayer of nickel is about 25 nm thick.
 7. The method of claim 4, whereinthe layer of gold is about 100 nm thick.
 8. The method of claim 4,wherein the layer of gold geranium, the layer of nickel and the layer ofgold are annealed in nitrogen gas at about 400° C. for about 60 seconds.9. The method of claim 1, further comprising: depositing a layer ofnitride after forming the contacts to the source-drain regions;depositing a layer of oxide over the layer of nitride and planaraizingthe oxide layer to the uppermost surface of the layer of nitride; andetching the layer of oxide and layer of nitride to the uppermost surfaceof the dummy gate.
 10. The method of claim 9, wherein the layer of oxideand the layer of nitride are reactively ion etched.
 11. The method ofclaim 1, further comprises: wet cleaning the surface of the substrateafter removing the dummy gate and the dummy oxide spacer; and removingsurface oxygen by exposing the substrate to atomic hydrogen.
 12. Themethod of claim 1, wherein the passivation layer comprises amorphoussilicon.
 13. The method of claim 12, wherein the amorphous silicon isdeposited using in-situ molecular beam epitaxy.
 14. The method of claim1, wherein the passivation layer is approximately 1.5 nm thick.
 15. Themethod of claim 1, wherein the oxide layer is oxidized in air.
 16. Themethod of claim 1, wherein the oxide layer comprises silicon dioxide.17. The method of claim 1, wherein the oxide layer is between about 0.3nm to about 10 nm thick.
 18. The method of claim 1, wherein the oxidelayer is less than 1 nm thick.
 19. The method of claim 1, wherein thedielectric layer comprises hafnium oxide.
 20. The method of claim 1,wherein the dielectric layer is approximately 10 nm thick.
 21. Themethod of claim 1, wherein the dielectric layer is deposited usingatomic layer deposition at 300° C.
 22. The method of claim 1, furthercomprising: annealing the device at 600° C. in nitrogen gas containing5% oxygen after depositing the dielectric layer.
 23. A method forfabricating a gallium arsenide MOSFET device, the method comprising:depositing a sacrificial oxide layer on a substrate of gallium arsenide;forming shallow trench isolations regions in the substrate; implantingdeep p-wells into the substrate; implanting and annealing shallown-channels after the deep p-well implants; forming a dummy gate over theshallow n-channel and the sacrificial oxide layer; implantingsource-drain extensions adjacent the dummy gate and the shallow trenchisolation regions; forming dummy oxide spacers along the sidewalls ofthe dummy gate and over a portion of the source-drain extensions;implanting and annealing source-drain regions adjacent the source-drainextensions and the shallow trench isolation regions; forming insulatingspacers on the sides of the dummy oxide spacers; defining thesource-drain regions with a photoresist layer; forming a conductivelayer over the photoresist layer; lifting off the photoresist layer andannealing the conductive layer over the source-drain regions to formalloy contacts to the source-drain regions; depositing a layer ofnitride; depositing a first layer of oxide over the layer of nitride andplanaraizing the first oxide layer to the uppermost surface of the layerof nitride, wherein the uppermost surface of the first layer of oxide isco-planar to the uppermost surface of the layer of nitride; etching thefirst layer of oxide and layer of nitride to the uppermost surface ofthe dummy gate; removing the dummy gate; removing the dummy oxidespacers and the sacrificial oxide layer; wet cleaning the surface of thesubstrate; removing surface oxygen using atomic hydrogen; depositingin-situ a passivation layer; oxidizing the surface of the passivationlayer to create a second oxide layer; depositing ex-situ a dielectriclayer over the second oxide layer; and depositing gate metal over thedielectric layer to form a gate stack.
 24. The method of claim 23,wherein the sacrificial oxide layer is about 10 nm thick.
 25. The methodof claim 23, wherein the sacrificial oxide layer is deposited using lowpressure chemical vapor deposition.
 26. The method of claim 23, whereinthe shallow trench isolations regions are formed using liquid phasechemical enhanced oxidation.
 27. The method of claim 23, wherein theshallow trench isolations regions are formed using oxygen implantationfollowing activation annealing.
 28. The method of claim 27, whereinactivation annealing occurs at about 450° C. in a helium gas ambient.29. The method of claim 23, wherein the deep P-wells and shallown-channels are annealed at about 900° C. for about 5 seconds in nitrogengas.
 30. The method of claim 23, wherein the conductive layer is formedby evaporating a layer of gold geranium over the photoresist layer andthe source-drain regions, evaporating a layer of nickel over the layerof gold geranium and evaporating a layer of gold over the layer ofnickel,.
 31. The method of claim 23, wherein the gate metal isplanarized to the uppermost surface of the layer of nitride.
 32. Agallium arsenide MOSFET device, the device comprising: a substrate ofgallium arsenide; a dummy gate formed over the substrate; source-drainextensions implanted into the substrate adjacent the dummy gate; dummyoxide spacers formed along the sidewalls of the dummy gate and over aportion of the source-drain extensions; source-drain regions implantedinto the substrate adjacent the source-drain extensions; insulatingspacers formed on the sides of the dummy oxide spacers; contact pads incontact with the source-drain regions; a passivation layer in-situdeposited in the opening left after the removal of the dummy gate andthe dummy gate spacers; a layer of oxide formed over the passivationlayer; a dielectric layer ex-situ deposited over the oxide layer; andgate metal deposited over the dielectric layer creating a gate stack.33. The method of claim 32, wherein the substrate of gallium arsenide isundoped.
 34. The method of claim 32, wherein the substrate of galliumarsenide is has a (100) orientation.
 35. The device of claim 32, whereinthe contact pads are comprised of a gold feranium/nickel/gold alloy. 36.The device of claim 32, wherein the passivation layer comprisesamorphous silicon.
 37. The device of claim 32, wherein the oxide layercomprises silicon dioxide.
 38. The device of claim 32, wherein thedielectric layer comprises hafnium oxide.
 39. A gallium arsenide MOSFETdevice, the device comprising: a substrate of gallium arsenide; asacrificial oxide layer formed over the substrate of gallium arsenide;shallow trench isolations regions formed in the substrate; deep p-wellsimplanted into the substrate; shallow n-channels implanted into thesubstrate and annealed after the deep p-well implantation; a dummy gateformed over the shallow n-channel and the sacrificial oxide layer;source-drain extensions implanted into the substrate adjacent the dummygate and the shallow trench isolation regions; dummy oxide spacersformed along the sidewalls of the dummy gate and over a portion of thesource-drain extensions; source-drain regions implanted into thesubstrate adjacent the source-drain extensions and the shallow trenchisolation regions; insulating spacers formed on the sides of the dummyoxide spacers; gold geranium/nickel/gold alloy contact pads in contactwith the source-drain regions; a layer of nitride deposited over thedevice; a passivation layer in-situ deposited in the opening left afterthe removal of the dummy gate, dummy gate spacers and the sacrificialoxide layer; a layer of oxide formed over the passivation layer; adielectric layer ex-situ deposited over the oxide layer; and gate metaldeposited over the dielectric layer creating a gate stack.